Industry Leading High Pressure Pneumatic Actuators
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Built for extreme environments where zero leakage, zero contamination, high reliability, and long life are required.
Actuators
- Provides hermetic, zero leakage, clean actuation
- Operates in harsh environments
- Operates at extreme temperatures
- Actuates across a pressure boundary
This type of actuator is popular with semiconductor and vacuum equipment manufacturers due to its superior reliability, contamination-free operation, compact design and maintenance-free operation.
Innovation
PRIME MOVER™ uses an edge-welded metal bellow (essentially a hermetic spring) as the force-generating mechanism instead of a traditional piston. As a pressure differential is applied across the bellows, it compresses or extends. If external pressure is applied, the bellows compress, extending the actuator. If pressure is removed, the bellows spring force retracts the actuator. Double actuating versions are also available.
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PRIME MOVER™ Product Highlight
PRIME MOVER™ Precision Linear Actuators
Using our advanced metal bellows technology, the PRIME MOVER™ is a unique linear actuator that provides superior reliability and maintenance-free performance.
Metal Bellows has shipped thousands of these actuators for semiconductor applications requiring a hermetic seal for vacuum application. The actuator design eliminates stiction during motion and
provides excellent synchronicity for highly repeatable placement of wafers, etc., at the micron level.
Related Case Studies
“Just-right” solution delivers for IC manufacturer
An existing pneumatic actuator was repurposed by a major producer of semiconductor equipment for a new application. The existing actuator performed sub-optimally in the new application due to lower forces, higher operational life requirements, and more aggressive processing chemistries.
About Senior Metal Bellows
At Senior Metal Bellows, we’ve built a 65-year legacy of solving the toughest challenges in demanding industries, creating precision components that function under the harshest conditions. Our customers represent the top innovators in defense, aerospace, oil & gas, medicine and semiconductor manufacturing.
Our Company
Performance-driven organizations turn to the Senior Metal Bellows team of engineers, designers and fabricators—as passionate and committed colleagues—in order to push the boundaries of their disciplines. We have helped them accomplish their objectives from the deepest parts of the ocean floor to the far reaches of outer space.
Confidence & Reliability
As part of the Senior family of companies, we offer you the confidence and reliability of a global organization with significant resources and demonstrated stability.
We are proud to have played a part in some of the historic scientific, medical, and military breakthroughs of the 20th Century, and look forward to serving you, as you pursue tomorrow’s “impossible” goals. We hope you will consider us a ready and proven resource.
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(781) 786-8582
The PRIME MOVER™ is designed to deliver precise linear actuation time-after-time from the day you install it.
Synchronized Pneumatic Actuation
Our customer was looking to improve the performance of their wafer handling system. Their historical approach involved the use of an air cylinder and an edge-welded metal bellows to seal the penetration into the vacuum chamber.